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Kazuo Mera
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Hitachi-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for manufacturing semiconductor substrates
Patent number
7,485,874
Issue date
Feb 3, 2009
Sumco Corporation
Seiichi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanting apparatus and sample processing apparatus
Patent number
6,667,485
Issue date
Dec 23, 2003
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter
Patent number
6,614,190
Issue date
Sep 2, 2003
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter
Patent number
6,570,171
Issue date
May 27, 2003
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanting apparatus and sample processing apparatus
Patent number
6,501,080
Issue date
Dec 31, 2002
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter
Patent number
6,429,442
Issue date
Aug 6, 2002
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation system and ion implantation method
Patent number
6,403,969
Issue date
Jun 11, 2002
Hitachi, Ltd.
Kazuo Mera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter
Patent number
6,362,490
Issue date
Mar 26, 2002
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanting apparatus capable of preventing discharge flaw produ...
Patent number
6,104,025
Issue date
Aug 15, 2000
Hitachi, Ltd.
Katsumi Tokiguchi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion implanting apparatus capable of preventing discharge flaw produ...
Patent number
5,945,681
Issue date
Aug 31, 1999
Hitachi, Ltd.
Katsumi Tokiguchi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion implanter for implanting ion on wafer with low contamination
Patent number
5,932,883
Issue date
Aug 3, 1999
Hitachi, Ltd.
Isao Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion injection device and method therefor
Patent number
5,753,923
Issue date
May 19, 1998
Hitachi, Ltd.
Kazuo Mera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser machining apparatus and method of the same
Patent number
5,229,569
Issue date
Jul 20, 1993
Hitachi, Ltd.
Tateoki Miyauchi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser marking system
Patent number
5,157,235
Issue date
Oct 20, 1992
Hitachi, Ltd.
Kiyoshi Okumura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Optical path adjusting system with dual-axis wedge prisms
Patent number
5,045,679
Issue date
Sep 3, 1991
Hitachi, Ltd.
Minoru Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Apparatus for manufacturing semiconductor substrates
Publication number
20070114458
Publication date
May 24, 2007
Seiichi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer temperature detection device for ion implanter
Publication number
20030138028
Publication date
Jul 24, 2003
Seiji Takayama
G01 - MEASURING TESTING
Information
Patent Application
Ion implanting apparatus and sample processing apparatus
Publication number
20030052283
Publication date
Mar 20, 2003
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implanter
Publication number
20020148977
Publication date
Oct 17, 2002
Hitachi, Ltd.
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implanter
Publication number
20020105277
Publication date
Aug 8, 2002
Hiroyuki Tomita
H01 - BASIC ELECTRIC ELEMENTS