Kazuo Murakami

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 10,062,547
- Issue date Aug 28, 2018
- Tokyo Electron Limited
- Naoki Mihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 8,920,596
- Issue date Dec 30, 2014
- Tokyo Electron Limited
- Naoki Mihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and gas supply member support device
- Patent number 8,663,424
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Naoki Mihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140338602
- Publication date Nov 20, 2014
- Naoki MIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER SUPPORT DEVICE
- Publication number 20110308733
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Naoki Mihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110048642
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Naoki MIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...