Kazuo Nakajima

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 7,422,641
- Issue date Sep 9, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 7,314,529
- Issue date Jan 1, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING
Information Patent Grant
Concentration controlling method and a substate treating apparatus...
- Patent number 5,715,173
- Issue date Feb 3, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- G01 - MEASURING TESTING
Information Patent Grant
Chemical agent producing device and method thereof
- Patent number 5,674,410
- Issue date Oct 7, 1997
- Dainippon Screen Manufacturing Co., Ltd.
- Kazuo Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of taking out lead of semiconductor tip part
- Patent number 4,850,105
- Issue date Jul 25, 1989
- Horiba, Ltd.
- Kazuo Nakajima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning apparatus and substrate cleaning method
- Publication number 20050115596
- Publication date Jun 2, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING
Information Patent Application
Foreign matter removing apparatus, substrate treating apparatus, an...
- Publication number 20040261817
- Publication date Dec 30, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus and substrate cleaning method
- Publication number 20030084925
- Publication date May 8, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING