Kazuo NAKAYA

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and control system
- Patent number 11,060,190
- Issue date Jul 13, 2021
- Kokusai Electric Corporation
- Kazuo Nakaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,690,879
- Issue date Jun 27, 2017
- Hitachi Kokusai Electric Inc.
- Hiroyuki Mitsui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220310413
- Publication date Sep 29, 2022
- Kokusai Electric Corporation
- Kazuo NAKAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220002870
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Kazuo NAKAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL SYSTEM, AND METHOD OF MANUF...
- Publication number 20190301020
- Publication date Oct 3, 2019
- Kokusai Electric Corporation
- Kazuo NAKAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20140074277
- Publication date Mar 13, 2014
- Hitachi Kokusai Electric Inc.
- Hiroyuki MITSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...