Kazuo Sakamoto

Person

Kumamoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 8,813,678
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Kazuo Sakamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,267,037
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kazuo Sakamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treatment apparatus
- Patent number 8,006,636
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Kazuo Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing treatment method and developing treatment unit
- Patent number 6,706,321
- Issue date Mar 16, 2004
- Tokyo Electron Limited
- Akira Nishiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for determining exposure conditions, method for determini...
- Patent number 6,657,215
- Issue date Dec 2, 2003
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,402,399
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus
- Patent number 6,391,111
- Issue date May 21, 2002
- Tokyo Electron Limited
- Akihiro Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,382,849
- Issue date May 7, 2002
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating a resist film, with pretesting for particle contamination
- Patent number 6,268,013
- Issue date Jul 31, 2001
- Tokyo Electron Limited
- Masami Akimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,241,403
- Issue date Jun 5, 2001
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus and method thereof
- Patent number 6,241,402
- Issue date Jun 5, 2001
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for supplying a process solution
- Patent number 6,193,783
- Issue date Feb 27, 2001
- Tokyo Electron Limited
- Kazuo Sakamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method and apparatus for coating a film on an object being processed
- Patent number 5,938,847
- Issue date Aug 17, 1999
- Tokyo Electron Limited
- Masami Akimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING JIG AND LIQUID PROCESSING METHOD
- Publication number 20150108001
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Kazuo SAKAMOTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND TEMPLATE
- Publication number 20140311530
- Publication date Oct 23, 2014
- TOKYO ELECTRON LIMITED
- Haruo Iwatsu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20120304920
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Kazuo Sakamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20090025637
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Kazuo TERADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090013932
- Publication date Jan 15, 2009
- TOKYO ELECTRON LIMITED
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatusn for determining exposure conditions, method for determin...
- Publication number 20020005496
- Publication date Jan 17, 2002
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing treatment method and developing treatment unit
- Publication number 20010050050
- Publication date Dec 13, 2001
- Akira Nishiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing method and developing apparatus
- Publication number 20010016121
- Publication date Aug 23, 2001
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kazuo Sakamoto

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus

Substrate treatment apparatus

Developing treatment method and developing treatment unit

Apparatus for determining exposure conditions, method for determini...

Developing method and developing apparatus

Coating apparatus

Developing method and developing apparatus

Coating a resist film, with pretesting for particle contamination

Developing method and developing apparatus

Developing apparatus and method thereof

Apparatus and method for supplying a process solution

Method and apparatus for coating a film on an object being processed

Patents Applicationslast 30 patents

LIQUID PROCESSING JIG AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND TEMPLATE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS

Apparatusn for determining exposure conditions, method for determin...

Developing treatment method and developing treatment unit

Developing method and developing apparatus