Kazuo SASAKI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled plasma processing apparatus
- Patent number 9,543,121
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Kazuo Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma processing apparatus
- Patent number 8,597,463
- Issue date Dec 3, 2013
- Tokyo Electron Limited
- Kazuo Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
- Publication number 20120267051
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Kazuo SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
- Publication number 20100175831
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Kazuo SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20050241769
- Publication date Nov 3, 2005
- TOKYO ELECTRON LIMITED
- Tsutomu Satoyoshi
- H01 - BASIC ELECTRIC ELEMENTS