Kazuo Sawai

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Patents Grantslast 30 patents

Information Patent Grant
Determination method, control method, determination apparatus, patt...
- Patent number 9,396,911
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Keisuke Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure condition setting method, substrate processing apparatus,...
- Patent number 8,500,950
- Issue date Aug 6, 2013
- Tokyo Electron Limited
- Kazuo Sawai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, program, computer-readable storage med...
- Patent number 8,007,968
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Yoshiaki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure condition setting method, substrate processing device, and...
- Patent number 7,960,078
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Kazuo Sawai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN FORMING SYSTEM AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20160300698
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Keisuke Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINATION METHOD, CONTROL METHOD, DETERMINATION APPARATUS, PATT...
- Publication number 20120249986
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Keisuke Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE CONDITION SETTING METHOD, SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20110220287
- Publication date Sep 15, 2011
- TOKYO ELECTON LIMITED
- Kazuo SAWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...
- Publication number 20090258304
- Publication date Oct 15, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure Condition Setting Method, Substrate Processing Device, and...
- Publication number 20070298335
- Publication date Dec 27, 2007
- Tokyo Electon Limited
- Kazuo Sawai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY