Kazuo SHIGETA

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Nirasaki-City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for processing a target object
- Patent number 8,759,227
- Issue date Jun 24, 2014
- Tokyo Electron Limited
- Kazuki Narishige
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PROCESSING A TARGET OBJECT
- Publication number 20110059616
- Publication date Mar 10, 2011
- TOKYO ELECTRON LIMITED
- Kazuki NARISHIGE
- H01 - BASIC ELECTRIC ELEMENTS