Kazuo Shimane

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Patents Grantslast 30 patents

Information Patent Grant
Wafer positioning mechanism using a notch formed on the wafer perip...
- Patent number 5,028,200
- Issue date Jul 2, 1991
- Fujitsu Limited
- Kazuo Shimane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer positioning apparatus
- Patent number 4,955,780
- Issue date Sep 11, 1990
- Fujitsu Limited
- Kazuo Shimane
- H01 - BASIC ELECTRIC ELEMENTS