Kazuo Tawarayama

Follow

Person

Yokosuka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam drawing apparatus, deflection amplifier, deflection c...
- Patent number 7,985,958
- Issue date Jul 26, 2011
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY EVALUATING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING M...
- Publication number 20080293169
- Publication date Nov 27, 2008
- KABUSHI KAISHA TOSHIBA
- Kazuo TAWARAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electron beam drawing apparatus, deflection amplifier, deflection c...
- Publication number 20060151721
- Publication date Jul 13, 2006
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithography evaluating method, semiconductor device manufacturing m...
- Publication number 20050167661
- Publication date Aug 4, 2005
- Kazuo Tawarayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY