Kazuo TAWARAYAMA

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Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANAGING EUV EXPOSURE MASK AND EXPOSURE METHOD
- Publication number 20110285975
- Publication date Nov 24, 2011
- Kazuo TAWARAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF ADJUSTING...
- Publication number 20100193712
- Publication date Aug 5, 2010
- Kazuo TAWARAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND OPTICAL APPARATUS
- Publication number 20090141378
- Publication date Jun 4, 2009
- Kazuo TAWARAYAMA
- G02 - OPTICS
Information Patent Application
MICROFABRICATION APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090095711
- Publication date Apr 16, 2009
- Takeshi Koshiba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
FOCUS MONITORING METHOD
- Publication number 20080137981
- Publication date Jun 12, 2008
- Kazuo TAWARAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY