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Kazuo Tawarayama
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Mie-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Pattern shape adjustment method, pattern shape adjustment system, e...
Patent number
9,885,960
Issue date
Feb 6, 2018
TOSHIBA MEMORY CORPORATION
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask alignment mark, photomask, exposure apparatus, exposure method...
Patent number
9,772,566
Issue date
Sep 26, 2017
TOSHIBA MEMORY CORPORATION
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light source apparatus and method of adjusting...
Patent number
8,067,757
Issue date
Nov 29, 2011
Kabushiki Kaisha Toshiba
Kazuo Tawarayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Focus monitoring method
Patent number
8,023,759
Issue date
Sep 20, 2011
Kabushiki Kaisha Toshiba
Kazuo Tawarayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, reticle, and method of manufacturing semiconductor...
Patent number
6,558,852
Issue date
May 6, 2003
Kabushiki Kaisha Toshiba
Kazuo Tawarayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MASK ALIGNMENT MARK, PHOTOMASK, EXPOSURE APPARATUS, EXPOSURE METHOD...
Publication number
20170003606
Publication date
Jan 5, 2017
KABUSHIKI KAISHA TOSHIBA
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET RADIATION EXPOSURE APPARATUS AND METHOD OF LITH...
Publication number
20150227054
Publication date
Aug 13, 2015
KABUSHIKI KAISHA TOSHIBA
Yukinobu MIYAMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN SHAPE ADJUSTMENT METHOD, PATTERN SHAPE ADJUSTMENT SYSTEM, E...
Publication number
20150183059
Publication date
Jul 2, 2015
KABUSHIKI KAISHA TOSHIBA
Nobuhiro Komine
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PATTERNING METHOD AND TEMPLATE
Publication number
20140061969
Publication date
Mar 6, 2014
Yosuke OKAMOTO
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL