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Kazuo Tsuchiya

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of high selectivity SAC etching
    • Patent number 7,329,610
    • Issue date Feb 12, 2008
    • Tokyo Electron Limited
    • Kazuo Tsuchiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 5,622,593
    • Issue date Apr 22, 1997
    • Tokyo Electron Limited
    • Masashi Arasawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 5,547,539
    • Issue date Aug 20, 1996
    • Tokyo Electron Limited
    • Masashi Arasawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents