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Thin film formation method
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Patent number 4,987,008
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Issue date Jan 22, 1991
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Thin film manufacturing system
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Patent number 4,887,548
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Issue date Dec 19, 1989
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Semiconductor Energy Laboratory Co., Ltd.
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Kazuo Urata
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method and apparatus for forming a layer
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Patent number 4,857,139
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Issue date Aug 15, 1989
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Semiconductor Energy Laboratory Co., Ltd.
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Mamoru Tashiro
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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