Kazuo Yabe

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,923,177
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Keiji Tabuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,781,219
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus, film formation method, and storage medium
- Patent number 10,351,952
- Issue date Jul 16, 2019
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,290,496
- Issue date May 14, 2019
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming metal oxide film
- Patent number 9,552,981
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 9,425,071
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, film formation apparatus and storage medium
- Patent number 8,853,100
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,368,384
- Issue date May 6, 2008
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230162977
- Publication date May 25, 2023
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS
- Publication number 20220270940
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220013333
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Keiji TABUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Apparatus and Processing Method
- Publication number 20200299839
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON FILM, BORON FILM FORMING METHOD, HARD MASK, AND HARD MASK MAN...
- Publication number 20180090311
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Takahiro MIYAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180033618
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20160148801
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS, FILM FORMATION METHOD, AND STORAGE MEDIUM
- Publication number 20150361550
- Publication date Dec 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS, FILM FORMATION METHOD, AND STORAGE MEDIUM
- Publication number 20150354060
- Publication date Dec 10, 2015
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20150318170
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Metal Oxide Film
- Publication number 20150228473
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD, FILM FORMATION APPARATUS AND STORAGE MEDIUM
- Publication number 20140004713
- Publication date Jan 2, 2014
- Masanobu IGETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20120028471
- Publication date Feb 2, 2012
- TOKYO ELECTRON LIMITED
- Kenichi Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method of controlling substrate...
- Publication number 20090110824
- Publication date Apr 30, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20050245099
- Publication date Nov 3, 2005
- Atsushi Endo
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Processing apparatus and processing method

Film formation apparatus, film formation method, and storage medium

Substrate processing apparatus and substrate processing method

Method and apparatus for forming metal oxide film

Film forming method

Film formation method, film formation apparatus and storage medium

Film formation apparatus and method of using the same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Processing Apparatus and Processing Method

BORON FILM, BORON FILM FORMING METHOD, HARD MASK, AND HARD MASK MAN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

FILM FORMATION APPARATUS, FILM FORMATION METHOD, AND STORAGE MEDIUM

FILM FORMATION APPARATUS, FILM FORMATION METHOD, AND STORAGE MEDIUM

FILM FORMING METHOD

Method and Apparatus for Forming Metal Oxide Film

FILM FORMATION METHOD, FILM FORMATION APPARATUS AND STORAGE MEDIUM

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

Substrate processing apparatus and method of controlling substrate...

Film formation apparatus and method of using the same