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Kazuo Yamamoto
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Nirasaki-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor manufacturing facility and a semiconductor manufactur...
Patent number
6,883,283
Issue date
Apr 26, 2005
Tokyo Electron Limited
Osamu Suenaga
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Semiconductor manufacturing facility and a semiconductor manufactur...
Publication number
20020155731
Publication date
Oct 24, 2002
Osamu Suenaga
H01 - BASIC ELECTRIC ELEMENTS