-
Etching method and apparatus
-
Patent number 7,314,574
-
Issue date Jan 1, 2008
-
Ebara Corporation
-
Katsunori Ichiki
-
H01 - BASIC ELECTRIC ELEMENTS
-
Etching method and apparatus
-
Patent number 7,144,520
-
Issue date Dec 5, 2006
-
Ebara Corporation
-
Katsunori Ichiki
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
-
-
-
-
-
Beam processing apparatus
-
Patent number 6,849,857
-
Issue date Feb 1, 2005
-
Ebara Corporation
-
Katsunori Ichiki
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
Magnetic recording disk
-
Patent number 6,194,048
-
Issue date Feb 27, 2001
-
Ebara Corporation
-
Masahiro Hatakeyama
-
G11 - INFORMATION STORAGE
-