Kazushi Ishida

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of removing particles from stage and cleaning plate
- Patent number 6,565,419
- Issue date May 20, 2003
- Advantest Corporation
- Naoki Nishio
- B08 - CLEANING
Information Patent Grant
Method and system for charged particle beam exposure
- Patent number 6,046,459
- Issue date Apr 4, 2000
- Fujitsu Limited
- Nobuyuki Yasutake
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for charged particle beam exposure with fixed barycenter thr...
- Patent number 5,981,118
- Issue date Nov 9, 1999
- Fujitsu Ltd.
- Nobuyuki Yasutake
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 5,966,200
- Issue date Oct 12, 1999
- Fujuitsu Limited
- Kenichi Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam exposure method and apparatus
- Patent number 5,895,924
- Issue date Apr 20, 1999
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron-beam exposure device and a method of detecting a mark posi...
- Patent number 5,708,276
- Issue date Jan 13, 1998
- Fujitsu Limited
- Tatsuro Ohkawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-Y stage and charged particle beam exposure apparatus
- Patent number 5,561,299
- Issue date Oct 1, 1996
- Fujitsu Limited
- Kazushi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Push button switch using dome spring and switch element thereof
- Patent number 4,803,316
- Issue date Feb 7, 1989
- Fujitsu Limited
- Kazutoshi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Kazushi Ishida

Person

Patents Grantslast 30 patents

Method of removing particles from stage and cleaning plate

Method and system for charged particle beam exposure

Method for charged particle beam exposure with fixed barycenter thr...

Charged particle beam exposure apparatus

Charged particle beam exposure method and apparatus

Electron-beam exposure device and a method of detecting a mark posi...

X-Y stage and charged particle beam exposure apparatus

Push button switch using dome spring and switch element thereof