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Kazushi Tahara
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Parts management system and method and parts management program and...
Patent number
7,587,300
Issue date
Sep 8, 2009
Tokyo Electron Limited
Mitsuru Dohiwa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of maintaining and automatically inspecting processing appar...
Patent number
7,555,406
Issue date
Jun 30, 2009
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of self-diagnosing software for driving processing apparatus
Patent number
7,386,423
Issue date
Jun 10, 2008
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of automatically resetting processing apparatus
Patent number
6,954,716
Issue date
Oct 11, 2005
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of maintaining and automatically inspecting processing appar...
Publication number
20050090927
Publication date
Apr 28, 2005
TOKYO ELECTRON LIMITED
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods of self-diagnosing software for driving processing apparatus
Publication number
20050090926
Publication date
Apr 28, 2005
TOKYO ELECTRON LIMITED
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Parts management system and method and parts management program and...
Publication number
20040193437
Publication date
Sep 30, 2004
TOKYO ELECTRON LIMITED
Mitsuru Dohiwa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Part maintenance system and part maintenance method of semiconducto...
Publication number
20040071161
Publication date
Apr 15, 2004
TOKYO ELECTRON LIMITED
Kazushi Tahara
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for maintaining processor, method of automatically inspectin...
Publication number
20030182084
Publication date
Sep 25, 2003
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Part maintenance device of semiconductor processing system and meth...
Publication number
20020000677
Publication date
Jan 3, 2002
TOKYO ELECTRON LIMITED
Kazushi Tahara
G05 - CONTROLLING REGULATING