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Kazushi Tomita
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Kawaguchi, JP
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last 30 patents
Information
Patent Grant
Semiconductor integrated circuit device having capacitance element...
Patent number
5,880,497
Issue date
Mar 9, 1999
Hitachi, Ltd.
Shuji Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anisotropic etching method and apparatus
Patent number
5,766,498
Issue date
Jun 16, 1998
Hitachi, Ltd.
Masayuki Kojima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching system and plasma etching method
Patent number
5,593,540
Issue date
Jan 14, 1997
Hitachi, Ltd.
Kazushi Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device and process of manufacturin...
Patent number
5,508,540
Issue date
Apr 16, 1996
Hitachi, Ltd.
Shuji Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching system
Patent number
5,423,936
Issue date
Jun 13, 1995
Hitachi, Ltd.
Kazushi Tomita
H01 - BASIC ELECTRIC ELEMENTS