Kazushige Shiina

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 8,277,893
- Issue date Oct 2, 2012
- Japan Pionics Co., Ltd.
- Tatsuya Ohori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device with a substrate rotating mechanism
- Patent number 6,837,940
- Issue date Jan 4, 2005
- E.E. Technologies Inc.
- Junji Komeno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus for growing a material with reduced hazard
- Patent number 5,833,754
- Issue date Nov 10, 1998
- Fujitsu Limited
- Hiromi Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20090269938
- Publication date Oct 29, 2009
- Tatsuya Ohori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical vapor deposition apparatus
- Publication number 20070051316
- Publication date Mar 8, 2007
- Tatsuya Ohori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-forming device with a substrate rotating mechanism
- Publication number 20020083899
- Publication date Jul 4, 2002
- E.E. TECHNOLOGIES INC.
- Junji Komeno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...