Kazushige Tanaka

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning fluid for semiconductor substrate
- Patent number 5,705,089
- Issue date Jan 6, 1998
- Mitsubishi Gas Chemical Company, Inc.
- Yasuo Sugihara
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Process for purification of hydrogen peroxide
- Patent number 5,614,165
- Issue date Mar 25, 1997
- Mitsubishi Gas Chemical Co., Inc.
- Yasuo Sugihara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Cleaning solution of semiconductor substrate
- Patent number 5,302,311
- Issue date Apr 12, 1994
- Mitsubishi Gas Chemical Company, Inc.
- Yasuo Sugihara
- C01 - INORGANIC CHEMISTRY