Kazutaka KOBAYASHI

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holding method and substrate processing apparatus
- Patent number 10,128,139
- Issue date Nov 13, 2018
- SCREEN Holdings Co., Ltd.
- Kazutaka Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160284585
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Kazutaka KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS