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Kazutaka Miyamoto
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Mie, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Tapering method for poromeric polishing pad
Patent number
10,259,099
Issue date
Apr 16, 2019
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Koichi Yoshida
B24 - GRINDING POLISHING
Information
Patent Grant
Tapered poromeric polishing pad
Patent number
9,925,637
Issue date
Mar 27, 2018
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Koichi Yoshida
B24 - GRINDING POLISHING
Information
Patent Grant
Method for chemical mechanical polishing silicon wafers
Patent number
8,980,749
Issue date
Mar 17, 2015
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Yasuyuki Itai
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
TAPERING METHOD FOR POROMERIC POLISHING PAD
Publication number
20180036860
Publication date
Feb 8, 2018
Rohm and Haas Electronic Materials CMP Holdings, INC.
Koichi Yoshida
B24 - GRINDING POLISHING
Information
Patent Application
TAPERED POROMERIC POLISHING PAD
Publication number
20180036862
Publication date
Feb 8, 2018
Rohm and Haas Electronic Materials CMP Holdings, INC.
Koichi Yoshida
B24 - GRINDING POLISHING