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Kazutaka Sei
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Osaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
9,640,368
Issue date
May 2, 2017
Tokyo Electron Limited
Naoyuki Umehara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High frequency power device for protecting an amplifying element th...
Patent number
7,615,983
Issue date
Nov 10, 2009
Daihen Corporation
Satoru Hamaishi
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20140345802
Publication date
Nov 27, 2014
Naoyuki Umehara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH FREQUENCY POWER DEVICE
Publication number
20070076344
Publication date
Apr 5, 2007
DAIHEN Corporation
Satoru HAMAISHI
H01 - BASIC ELECTRIC ELEMENTS