Kazutaka Taki

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming pattern having optical angle in charged particle...
- Patent number 5,434,795
- Issue date Jul 18, 1995
- Fujitsu Limited
- Junichi Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure method and apparatus
- Patent number 5,329,130
- Issue date Jul 12, 1994
- Fujitsu Limited
- Junichi Kai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure apparatus control system and a metho...
- Patent number 5,225,684
- Issue date Jul 6, 1993
- Fujitsu Limited
- Kazutaka Taki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling charged particle beams in char...
- Patent number 5,134,300
- Issue date Jul 28, 1992
- Fujitsu Limited
- Junichi Kai
- H01 - BASIC ELECTRIC ELEMENTS