Kazuteru OBARA

Person

Oshu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus, heat treatment method, and film forming m...
- Patent number 11,784,070
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,674,224
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 11,656,126
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and film deposition method
- Patent number 11,581,201
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 10,533,896
- Issue date Jan 14, 2020
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 10,431,479
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition apparatus, film deposition method, computer readabl...
- Patent number 8,961,691
- Issue date Feb 24, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT...
- Publication number 20230417488
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Makoto TAKAHASHI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20220373260
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200340111
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND FILM FORMING M...
- Publication number 20200340116
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20200303222
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat Treatment Apparatus and Temperature Control Method
- Publication number 20200080895
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20180197759
- Publication date Jul 12, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASURING METHOD AND HEAT PROCESSING APPARATUS
- Publication number 20170003171
- Publication date Jan 5, 2017
- TOKYO ELECTRON LIMITED
- Yuki WADA
- G01 - MEASURING TESTING
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20160379897
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20100151131
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- KAZUTERU OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...
- Publication number 20100068893
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, COMPUTER READABL...
- Publication number 20100055351
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kazuteru OBARA

Person

Patents Grantslast 30 patents

Heat treatment apparatus, heat treatment method, and film forming m...

Film forming method and film forming apparatus

Heat treatment apparatus and temperature control method

Heat treatment apparatus and film deposition method

Heat treatment apparatus and temperature control method

Heat treatment apparatus and temperature control method

Film deposition apparatus, film deposition method, computer readabl...

Patents Applicationslast 30 patents

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

FILM FORMING METHOD AND FILM FORMING APPARATUS

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND FILM FORMING M...

HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD

Heat Treatment Apparatus and Temperature Control Method

HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD

TEMPERATURE MEASURING METHOD AND HEAT PROCESSING APPARATUS

HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, COMPUTER READABL...