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Chiyoda-ku, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck device having focus ring
Patent number
11,024,528
Issue date
Jun 1, 2021
Sumitomo Osaka Cement Co., Ltd.
Yoshiaki Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck device, and semiconductor manufacturing device
Patent number
10,475,688
Issue date
Nov 12, 2019
Sumitomo Osaka Cement Co., Ltd.
Kazunori Ishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck device with multiple fine protrusions or multip...
Patent number
10,389,278
Issue date
Aug 20, 2019
Sumitomo Osaka Cement Co., Ltd.
Yoshiaki Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic member
Patent number
9,776,380
Issue date
Oct 3, 2017
Sumitomo Osaka Cement Co., Ltd.
Shintaro Hayashi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Sintered objects and processes for producing same
Patent number
9,403,722
Issue date
Aug 2, 2016
Sumitomo Osaka Cement Co., Ltd.
Kazuto Ando
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Electrostatic chuck, production method of electrostatic chuck and e...
Patent number
8,358,493
Issue date
Jan 22, 2013
Sumitomo Osaka Cement Co., Ltd.
Hironori Kugimoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK DEVICE
Publication number
20180308737
Publication date
Oct 25, 2018
Sumitomo Osaka Cement Co., Ltd.
Yoshiaki MORIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
Publication number
20180025933
Publication date
Jan 25, 2018
Sumitomo Osaka Cement Co., Ltd.
Kazunori ISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK DEVICE
Publication number
20160036355
Publication date
Feb 4, 2016
SMITOMO OSAKA CEMENT CO., LTD.
Yoshiaki Moriya
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
ELECTROSTATIC CHUCK MEMBER
Publication number
20150070815
Publication date
Mar 12, 2015
Hironori Kugimoto
B82 - NANO-TECHNOLOGY
Information
Patent Application
CERAMIC MEMBER
Publication number
20130183503
Publication date
Jul 18, 2013
SUMITOMO OSAKA CEMENT CO., LTD.
Shintaro Hayashi
B82 - NANO-TECHNOLOGY
Information
Patent Application
ELECTROSTATIC CHUCK, PRODUCTION METHOD OF ELECTROSTATIC CHUCK AND E...
Publication number
20110149462
Publication date
Jun 23, 2011
Sumitomo Osaka Cement Co., Ltd.
Hironori Kugimoto
H01 - BASIC ELECTRIC ELEMENTS