Kazuto Ashiwara

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic deflector for electron beam exposure apparatus
- Patent number 6,509,568
- Issue date Jan 21, 2003
- Advantest Corporation
- Yoshihisa Ooae
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic deflector for electron beam exposure apparatus
- Publication number 20020020354
- Publication date Feb 21, 2002
- Yoshihisa Ooae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic deflector for electron beam exposure apparatus
- Publication number 20010045528
- Publication date Nov 29, 2001
- Yoshihisa Ooae
- H01 - BASIC ELECTRIC ELEMENTS