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KAZUTO NISHIZAKI
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SHIMADA-SHI, JP
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Patents Grants
last 30 patents
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Patent Grant
Wafer cleaning device and tray for use in wafer cleaning device
Patent number
6,616,774
Issue date
Sep 9, 2003
SPC Electronics
Haruki Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Wafer cleaning device and tray for use in wafer cleaning device
Publication number
20020066472
Publication date
Jun 6, 2002
Haruki Sonoda
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
WAFER CLEANING DEVICE AND TRAY FOR USE IN WAFER CLEANING DEVICE
Publication number
20010047817
Publication date
Dec 6, 2001
HARUKI SONODA
H01 - BASIC ELECTRIC ELEMENTS