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Kazuto Ogawa

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  • Yamanashi-ken, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20150287618
    • Publication date Oct 8, 2015
    • TOKYO ELECTRON LIMITED
    • Hiroie MATSUMOTO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20150243521
    • Publication date Aug 27, 2015
    • TOKYO ELECTRON LIMITED
    • Kazuto Ogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • Publication number 20150228500
    • Publication date Aug 13, 2015
    • TOKYO ELECTRON LIMITED
    • Kazuto OGAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • Publication number 20150056817
    • Publication date Feb 26, 2015
    • TOKYO ELECTRON LIMITED
    • Kazuto Ogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • Publication number 20150037982
    • Publication date Feb 5, 2015
    • TOKYO ELECTRON LIMITED
    • Kazuto OGAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20140120732
    • Publication date May 1, 2014
    • TOKYO ELECTRON LIMITED
    • Hiroie MATSUMOTO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING METHOD
    • Publication number 20070298617
    • Publication date Dec 27, 2007
    • TOKYO ELECTRON LIMITED
    • Akihito Toda
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Etching method
    • Publication number 20050085077
    • Publication date Apr 21, 2005
    • Kazuto Ogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Processing method
    • Publication number 20040259356
    • Publication date Dec 23, 2004
    • Akihito Toda
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY