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Kazuto Yoshida
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Ibo-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,011,634
Issue date
Apr 21, 2015
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,960,124
Issue date
Feb 24, 2015
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,480,912
Issue date
Jul 9, 2013
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment apparatus
Patent number
7,806,078
Issue date
Oct 5, 2010
Mitsubishi Heavy Industries, Ltd.
Kazuto Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Power supply antenna and power supply method
Patent number
7,520,246
Issue date
Apr 21, 2009
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and its manufacturing method
Patent number
7,283,346
Issue date
Oct 16, 2007
Mitsubishi Heavy Industries, Ltd.
Kazuto Yoshida
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Process for producing optically active flurbiprofen
Patent number
7,214,820
Issue date
May 8, 2007
Nagase & Co., Ltd.
Shunji Kamiyama
C07 - ORGANIC CHEMISTRY
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20130025790
Publication date
Jan 31, 2013
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20120135164
Publication date
May 31, 2012
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS EXHAUST STRUCTURE, AND APPARATUS AND METHOD FOR PLASMA PROCESSING
Publication number
20120132619
Publication date
May 31, 2012
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20120125891
Publication date
May 24, 2012
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURE OF SUBSTRATE SUPPORTING TABLE, AND PLASMA PROCESSING APPA...
Publication number
20120111502
Publication date
May 10, 2012
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20090127227
Publication date
May 21, 2009
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20070107843
Publication date
May 17, 2007
Mitsubishi Heavy Industries, Ltd.
Yuichi Kawano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA TREATMENT APPARATUS
Publication number
20070090032
Publication date
Apr 26, 2007
Kazuto Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for producing optically active flurbiprofen
Publication number
20060135617
Publication date
Jun 22, 2006
Shunji Kamiyama
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Power supply antenna and power supply method
Publication number
20060027168
Publication date
Feb 9, 2006
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chuck and its manufacturing method
Publication number
20040233609
Publication date
Nov 25, 2004
Kazuto Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma treatment apparatus
Publication number
20040026038
Publication date
Feb 12, 2004
Kazuto Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Power supply antenna and power supply method
Publication number
20020018025
Publication date
Feb 14, 2002
Mitsubishi Heavy Industries, Ltd.
Ryuichi Matsuda
H01 - BASIC ELECTRIC ELEMENTS