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Kazutoshi Ishimaru
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Kikuchi-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,257,701
Issue date
Feb 22, 2022
Tokyo Electron Limited
Hidekazu Kiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device, substrate transfer method and recording...
Patent number
10,879,100
Issue date
Dec 29, 2020
Tokyo Electron Limited
Tokutarou Hayashi
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Bonding system
Patent number
10,840,213
Issue date
Nov 17, 2020
Tokyo Electron Limited
Masataka Matsunaga
B32 - LAYERED PRODUCTS
Information
Patent Grant
Substrate transfer device and bonding system
Patent number
10,424,502
Issue date
Sep 24, 2019
Tokyo Electron Limited
Masataka Matsunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method for adjusting a substrate...
Patent number
6,973,370
Issue date
Dec 6, 2005
Tokyo Electron Limited
Kazuhiko Ito
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20200111693
Publication date
Apr 9, 2020
TOKYO ELECTRON LIMITED
Hidekazu Kiyama
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD AND RECORDING...
Publication number
20180240695
Publication date
Aug 23, 2018
TOKYO ELECTRON LIMITED
Tokutarou Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING SYSTEM
Publication number
20180019226
Publication date
Jan 18, 2018
TOKYO ELECTRON LIMITED
Masataka MATSUNAGA
B32 - LAYERED PRODUCTS
Information
Patent Application
SUBSTRATE TRANSFER DEVICE AND BONDING SYSTEM
Publication number
20180019153
Publication date
Jan 18, 2018
TOKYO ELECTRON LIMITED
Masataka MATSUNAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and method for adjusting a substrate...
Publication number
20050016818
Publication date
Jan 27, 2005
TOKYO ELECTRON LIMITED
Kazuhiko Ito
H01 - BASIC ELECTRIC ELEMENTS