Kazutoshi ITOH

Person

Komaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature control system, semiconductor manufacturing device, and...
- Patent number 10,553,463
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control system, semiconductor manufacturing device, and...
- Patent number 9,984,908
- Issue date May 29, 2018
- Tokyo Electron Limited
- Atsushi Kobayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Electromagnetic coil, method of manufacturing electromagnetic coil,...
- Patent number 9,508,476
- Issue date Nov 29, 2016
- CKD Corporation
- Masayuki Kouketsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid mixing system and fluid mixing apparatus
- Patent number 8,201,989
- Issue date Jun 19, 2012
- CKD Corporation
- Kazutoshi Itoh
- G05 - CONTROLLING REGULATING
Information Patent Grant
Flow verification system and flow verification method
- Patent number 7,904,257
- Issue date Mar 8, 2011
- CKD Corporation
- Akiko Nakada
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20180269090
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Atsushi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC COIL, METHOD OF MANUFACTURING ELECTROMAGNETIC COIL,...
- Publication number 20150332828
- Publication date Nov 19, 2015
- CKD CORPORATION
- Masayuki KOUKETSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20140262199
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Passage block and manufacturing method thereof
- Publication number 20110277325
- Publication date Nov 17, 2011
- CKD CORPORATION
- Mitsuru Mamyo
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
Fluid flow distribution and supply unit and flow distribution contr...
- Publication number 20090095364
- Publication date Apr 16, 2009
- CKD CORPORATION
- Kazutoshi Itoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fluid mixing system and fluid mixing apparatus
- Publication number 20090059717
- Publication date Mar 5, 2009
- CKD CORPORATION
- Kazutoshi Itoh
- G05 - CONTROLLING REGULATING
Information Patent Application
Flow verification system and flow verification method
- Publication number 20090063059
- Publication date Mar 5, 2009
- CKD CORPORATION
- Akiko Nakada
- G05 - CONTROLLING REGULATING
Information Patent Application
Gas supply unit
- Publication number 20080223455
- Publication date Sep 18, 2008
- CKD CORPORATION
- Jota Fukuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Passage block and manufacturing method thereof
- Publication number 20080202614
- Publication date Aug 28, 2008
- CKD CORPORATION
- Mitsuru Mamyo
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL

Kazutoshi ITOH

Person

Patents Grantslast 30 patents

Temperature control system, semiconductor manufacturing device, and...

Temperature control system, semiconductor manufacturing device, and...

Electromagnetic coil, method of manufacturing electromagnetic coil,...

Fluid mixing system and fluid mixing apparatus

Flow verification system and flow verification method

Patents Applicationslast 30 patents

TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...

ELECTROMAGNETIC COIL, METHOD OF MANUFACTURING ELECTROMAGNETIC COIL,...

TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...

Passage block and manufacturing method thereof

Fluid flow distribution and supply unit and flow distribution contr...

Fluid mixing system and fluid mixing apparatus

Flow verification system and flow verification method

Gas supply unit

Passage block and manufacturing method thereof