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Kazutoshi Iwai
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plating method and recording medium
Patent number
11,519,074
Issue date
Dec 6, 2022
Tokyo Electron Limited
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plating method, plating apparatus and recording medium
Patent number
11,230,767
Issue date
Jan 25, 2022
Tokyo Electron Limited
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plating method, plating apparatus and recording medium
Patent number
11,028,483
Issue date
Jun 8, 2021
Tokyo Electron Limited
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Forming method of hard mask
Patent number
11,004,684
Issue date
May 11, 2021
Tokyo Electron Limited
Mitsuaki Iwashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating method, plating apparatus and recording medium
Patent number
10,784,111
Issue date
Sep 22, 2020
Tokyo Electron Limited
Yuichiro Inatomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal wiring layer forming method, metal wiring layer forming appar...
Patent number
10,755,973
Issue date
Aug 25, 2020
Tokyo Electron Limited
Keiichi Fujita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plating apparatus, plating method, and recording medium
Patent number
10,731,256
Issue date
Aug 4, 2020
Tokyo Electron Limited
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Forming method of hard mask, forming apparatus of hard mask and rec...
Patent number
10,224,202
Issue date
Mar 5, 2019
Tokyo Electron Limited
Mitsuaki Iwashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Catalyst layer forming method, catalyst layer forming system and re...
Patent number
9,966,306
Issue date
May 8, 2018
Tokyo Electron Limited
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pre-treatment method of plating, storage medium, and plating system
Patent number
9,650,717
Issue date
May 16, 2017
Tokyo Electron Limited
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pre-treatment method for plating and storage medium
Patent number
9,523,153
Issue date
Dec 20, 2016
Tokyo Electron Limited
Takashi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cobalt base film-forming method, cobalt base film-forming material,...
Patent number
9,428,835
Issue date
Aug 30, 2016
GAS-PHASE GROWTH LTD.
Hideaki Machida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLATING METHOD AND PLATING APPARATUS
Publication number
20240309511
Publication date
Sep 19, 2024
TOKYO ELECTRON LIMITED
Takeshi Nagao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
Publication number
20220290302
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATING METHOD, PLATING SYSTEM, AND RECORDING MEDIUM
Publication number
20210108316
Publication date
Apr 15, 2021
TOKYO ELECTRON LIMITED
Nobutaka Mizutani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATING METHOD AND RECORDING MEDIUM
Publication number
20200325581
Publication date
Oct 15, 2020
TOKYO ELECTRON LIMITED
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
Publication number
20190271084
Publication date
Sep 5, 2019
TOKYO ELECTRON LIMITED
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
Publication number
20190267242
Publication date
Aug 29, 2019
TOKYO ELECTRON LIMITED
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
Publication number
20190256980
Publication date
Aug 22, 2019
TOKYO ELECTRON LIMITED
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL WIRING LAYER FORMING METHOD, METAL WIRING LAYER FORMING APPAR...
Publication number
20190229016
Publication date
Jul 25, 2019
TOKYO ELECTRON LIMITED
Keiichi Fujita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING METHOD OF HARD MASK
Publication number
20190157083
Publication date
May 23, 2019
TOKYO ELECTRON LIMITED
Mitsuaki Iwashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLATING APPARATUS, PLATING METHOD, AND RECORDING MEDIUM
Publication number
20170292192
Publication date
Oct 12, 2017
TOKYO ELECTRON LIMITED
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND REC...
Publication number
20170287713
Publication date
Oct 5, 2017
TOKYO ELECTRON LIMITED
Mitsuaki Iwashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING...
Publication number
20160247765
Publication date
Aug 25, 2016
TOKYO ELECTRON LIMITED
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM AND RE...
Publication number
20160247683
Publication date
Aug 25, 2016
TOKYO ELECTRON LIMITED
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRE-TREATMENT METHOD OF PLATING, STORAGE MEDIUM, AND PLATING SYSTEM
Publication number
20150247242
Publication date
Sep 3, 2015
TOKYO ELECTRON LIMITED
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRE-TREATMENT METHOD FOR PLATING AND STORAGE MEDIUM
Publication number
20150140209
Publication date
May 21, 2015
TOKYO ELECTRON LIMITED
Takashi Tanaka
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
COBALT BASE FILM-FORMING METHOD, COBALT BASE FILM-FORMING MATERIAL,...
Publication number
20140248427
Publication date
Sep 4, 2014
TOKYO ELECTRON LIMITED
Hideaki Machida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...