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Kazutoshi Murata

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Patents Grantslast 30 patents

  • Information Patent Grant

    Atomic layer deposition apparatus
    • Patent number 9,194,043
    • Issue date Nov 24, 2015
    • Mitsui Engineering & Shipbuilding
    • Hiroyuki Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition apparatus and thin film forming method
    • Patent number 9,068,261
    • Issue date Jun 30, 2015
    • Mitsui Engineering & Shipbuilding Co., Ltd.
    • Kazutoshi Murata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for growing plasma atomic layer
    • Patent number 8,440,268
    • Issue date May 14, 2013
    • Mitsui Engineering & Shipbuilding Co., Ltd.
    • Keisuki Washio
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer growing apparatus
    • Patent number 8,202,367
    • Issue date Jun 19, 2012
    • Mitsui Engineering & Shipbuilding Co., Ltd.
    • Hiroyuki Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Large-diameter SiC wafer and manufacturing method thereof
    • Patent number 7,544,249
    • Issue date Jun 9, 2009
    • Mitsui Engineering Co. Ltd.
    • Shigehiro Nishino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Production method of SiC monitor wafer
    • Patent number 7,022,545
    • Issue date Apr 4, 2006
    • Mitsui Engineering & Shipbuilding Co., Ltd.
    • Isao Yamada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Production method of α-SiC wafer
    • Patent number 6,995,036
    • Issue date Feb 7, 2006
    • Mitsui Engineering & Shipbuilding Co., Ltd.
    • Shigehiro Nishino
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    THIN FILM FORMING APPARATUS
    • Publication number 20130104803
    • Publication date May 2, 2013
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Kazuki Takizawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20110303147
    • Publication date Dec 15, 2011
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Hiroyuki Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS AND THIN FILM FORMING METHOD
    • Publication number 20110305836
    • Publication date Dec 15, 2011
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Kazutoshi Murata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD
    • Publication number 20110293853
    • Publication date Dec 1, 2011
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Kazuki Takizawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TOMIC LAYER FILM FORMING APPARATUS
    • Publication number 20110017135
    • Publication date Jan 27, 2011
    • Kazutoshi Murata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER GROWING APPARATUS AND THIN FILM FORMING METHOD
    • Publication number 20110008550
    • Publication date Jan 13, 2011
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Kazutoshi Murata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR GROWING PLASMA ATOMIC LAYER
    • Publication number 20090291232
    • Publication date Nov 26, 2009
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Keisuki Washio
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER GROWING APPARATUS
    • Publication number 20090266296
    • Publication date Oct 29, 2009
    • Hiroyuki Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Large-diameter sic wafer and manufacturing method thereof
    • Publication number 20060097266
    • Publication date May 11, 2006
    • MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
    • Shigehiro Nishino
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Production method of sic monitor wafer
    • Publication number 20050042800
    • Publication date Feb 24, 2005
    • MITSUI ENGINEERING & SHIPPING CO LTD
    • Isao Yamada
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Production method of alpha-sic wafer
    • Publication number 20040241343
    • Publication date Dec 2, 2004
    • Shigehiro Nishino
    • C30 - CRYSTAL GROWTH