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Kazutoshi Yano
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
Patent number
7,205,024
Issue date
Apr 17, 2007
Tokyo Electron Limited
Kazuhiro Takeshita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
Patent number
6,726,775
Issue date
Apr 27, 2004
Tokyo Electron Limited
Kazuhiro Takeshita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
Patent number
6,589,339
Issue date
Jul 8, 2003
Tokyo Electron Limited
Kazuhiro Takeshita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Spin coating apparatus including aging unit and solvent replacement...
Patent number
6,248,168
Issue date
Jun 19, 2001
Tokyo Electron Limited
Kazuhiro Takeshita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
Publication number
20150228512
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Makoto Muramatsu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
Publication number
20060292298
Publication date
Dec 28, 2006
TOKYO ELECTRON LIMITED
Kazuhiro Takeshita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
Publication number
20040156996
Publication date
Aug 12, 2004
TOKYO ELECTRON LIMITED
Kazuhiro Takeshita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
Publication number
20030196595
Publication date
Oct 23, 2003
TOKYO ELECTRON LIMITED
Kazuhiro Takeshita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
Publication number
20010017103
Publication date
Aug 30, 2001
TOKYO ELECTRON LIMITED
Kazuhiro Takeshita
H01 - BASIC ELECTRIC ELEMENTS