Kazuumi Tanaka

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and processing apparatus
- Patent number 11,955,360
- Issue date Apr 9, 2024
- Tocalo Co., Ltd.
- Takeshi Takabatake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,710,619
- Issue date Jul 25, 2023
- HITACHI HIGH-TECH CORPORATION
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND PROCESSING APPARATUS
- Publication number 20230154780
- Publication date May 18, 2023
- TOCALO CO., LTD.
- Takeshi TAKABATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20150214014
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Kohei SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND VACUUM PROCESSING APPARATUS
- Publication number 20140377958
- Publication date Dec 25, 2014
- Hitachi High-Technologies Corporation
- Kazuumi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS