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Kazuya Asaoka
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Aichi, JP
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Patent Grant
Holding member for inspection, inspection device and inspecting method
Patent number
8,159,245
Issue date
Apr 17, 2012
Tokyo Electron Limited
Shigekazu Komatsu
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
HOLDING MEMBER FOR INSPECTION, INSPECTION DEVICE AND INSPECTING METHOD
Publication number
20100033199
Publication date
Feb 11, 2010
TOKYO ELECTRON LIMITED
Shigekazu Komatsu
G01 - MEASURING TESTING