KAZUYA DAITO

Person

Milipitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-line metrology systems, apparatus, and methods for optical devices
- Patent number 12,236,575
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Yangyang Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Processing chamber with multiple plasma units
- Patent number 12,230,479
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line metrology systems, apparatus, and methods for optical devices
- Patent number 12,229,940
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Yangyang Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple-channel showerhead design and methods in manufacturing
- Patent number 12,152,302
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Illumination system for AR metrology tool
- Patent number 11,988,574
- Issue date May 21, 2024
- Applied Materials, Inc.
- Yangyang Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
See-through metrology systems, apparatus, and methods for optical d...
- Patent number 11,978,196
- Issue date May 7, 2024
- Yangyang Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Selective tungsten deposition at low temperatures
- Patent number 11,967,525
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing chamber with multiple plasma units
- Patent number 11,955,319
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-temperature plasma pre-clean for selective gap fill
- Patent number 11,955,381
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid management system for inkjet machines
- Patent number 11,884,076
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Daihua Zhang
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Inkjet platform for fabrication of optical films and structures
- Patent number 11,878,532
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Daihua Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multifunctional printhead service station with multi-axis motions
- Patent number 11,807,008
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Daihua Zhang
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Optical device metrology systems and related methods
- Patent number 11,802,791
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Jinxin Fu
- G01 - MEASURING TESTING
Information Patent Grant
See-through metrology systems, apparatus, and methods for optical d...
- Patent number 11,748,875
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Yangyang Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dual plasma pre-clean for selective gap fill
- Patent number 11,721,542
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Yi Xu
- B08 - CLEANING
Information Patent Grant
Substrate processing chamber having heated showerhead assembly
- Patent number 11,598,003
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective tungsten deposition within trench structures
- Patent number 11,515,200
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blocker plate for use in a substrate process chamber
- Patent number 11,421,322
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Xiaoxiong Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective tungsten deposition at low temperatures
- Patent number 11,404,313
- Issue date Aug 2, 2022
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a metal gapfill
- Patent number 11,355,391
- Issue date Jun 7, 2022
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing effective oxide thickness in a semiconductor str...
- Patent number 11,062,900
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Luping Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus to improve substrate temperature uniformity
- Patent number 10,793,951
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for measuring level of a precursor in a container
- Patent number 10,620,031
- Issue date Apr 14, 2020
- Applied Materials, Inc.
- Kazuya Daito
- G01 - MEASURING TESTING
Information Patent Grant
Methods for depositing semiconductor films
- Patent number 10,535,527
- Issue date Jan 14, 2020
- Applied Materials, Inc.
- Yi Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blocker plate for use in a substrate process chamber
- Patent number 10,508,339
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Xiaoxiong Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming low-resistance contacts through integrated proc...
- Patent number 9,947,578
- Issue date Apr 17, 2018
- Applied Materials, Inc.
- Yu Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming metal organic tungsten for middle of the line (...
- Patent number 9,653,352
- Issue date May 16, 2017
- Applied Materials, Inc.
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten growth modulation by controlling surface composition
- Patent number 9,169,556
- Issue date Oct 27, 2015
- Applied Materials, Inc.
- Kai Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD ALN film with oxygen doping for a low etch rate hardmask film
- Patent number 9,162,930
- Issue date Oct 20, 2015
- Applied Materials, Inc.
- Yong Cao
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR AR METROLOGY TOOL
- Publication number 20240385075
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Yangyang SUN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Processing Chamber With Multiple Plasma Units
- Publication number 20240249918
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM AND METHODS FOR FORMING VOID-FREE AND SEAM-FREE T...
- Publication number 20240209500
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Xi CEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK COVER PIECE TO ENABLE PROCESSING OF DIELECTRIC...
- Publication number 20240011147
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Andrew CEBALLOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES
- Publication number 20220367264
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIFUNCTIONAL PRINTHEAD SERVICE STATION WITH MULTI-AXIS MOTIONS
- Publication number 20220363060
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Daihua ZHANG
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
INKJET PLATFORM FOR FABRICATION OF OPTICAL FILMS AND STRUCTURES
- Publication number 20220363064
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Daihua ZHANG
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
FLUID MANAGEMENT SYSTEM FOR INKJET MACHINES
- Publication number 20220355589
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Daihua ZHANG
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Processing Chamber With Multiple Plasma Units
- Publication number 20220319813
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
- Publication number 20220319837
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING EFFICIENCY FOR OPTICAL DEVICES
- Publication number 20220291082
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Jinxin FU
- G01 - MEASURING TESTING
Information Patent Application
SELECTIVE TUNGSTEN DEPOSITION WITHIN TRENCH STRUCTURES
- Publication number 20220181201
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Yi XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DEVICE METROLOGY SYSTEMS AND RELATED METHODS
- Publication number 20220163382
- Publication date May 26, 2022
- Applied Materials, Inc.
- Jinxin FU
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION SYSTEM FOR AR METROLOGY TOOL
- Publication number 20220163423
- Publication date May 26, 2022
- Applied Materials, Inc.
- Yangyang SUN
- G01 - MEASURING TESTING
Information Patent Application
IN-LINE METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL DEVICES
- Publication number 20220122240
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Yangyang SUN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEE-THROUGH METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL D...
- Publication number 20220121030
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Yangyang SUN
- G02 - OPTICS
Information Patent Application
SEE-THROUGH METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL D...
- Publication number 20220120700
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Yangyang SUN
- G02 - OPTICS
Information Patent Application
IN-LINE METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL DEVICES
- Publication number 20220122241
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Yangyang SUN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTIPLE-CHANNEL SHOWERHEAD DESIGN AND METHODS IN MANUFACTURING
- Publication number 20220010431
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Kazuya DAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-TEMPERATURE PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
- Publication number 20210398850
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A SHOWERHEAD
- Publication number 20210335586
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Tom H. YU
- B08 - CLEANING
Information Patent Application
DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
- Publication number 20210159070
- Publication date May 27, 2021
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Chamber With Multiple Plasma Units
- Publication number 20210159052
- Publication date May 27, 2021
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES
- Publication number 20200335395
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A METAL GAPFILL
- Publication number 20200303250
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Xi CEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING EFFECTIVE OXIDE THICKNESS IN A SEMICONDUCTOR STR...
- Publication number 20200176247
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- LUPING LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER
- Publication number 20190382895
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
- Publication number 20190078210
- Publication date Mar 14, 2019
- FARUK GUNGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING SEMICONDUCTOR FILMS
- Publication number 20190019684
- Publication date Jan 17, 2019
- Applied Materials, Inc.
- Yi Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursor Level Sensor
- Publication number 20180364089
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Kazuya Daito
- G01 - MEASURING TESTING

KAZUYA DAITO

Person

Patents Grantslast 30 patents

In-line metrology systems, apparatus, and methods for optical devices

Processing chamber with multiple plasma units

In-line metrology systems, apparatus, and methods for optical devices

Multiple-channel showerhead design and methods in manufacturing

Illumination system for AR metrology tool

See-through metrology systems, apparatus, and methods for optical d...

Selective tungsten deposition at low temperatures

Processing chamber with multiple plasma units

Low-temperature plasma pre-clean for selective gap fill

Fluid management system for inkjet machines

Inkjet platform for fabrication of optical films and structures

Multifunctional printhead service station with multi-axis motions

Optical device metrology systems and related methods

See-through metrology systems, apparatus, and methods for optical d...

Dual plasma pre-clean for selective gap fill

Substrate processing chamber having heated showerhead assembly

Selective tungsten deposition within trench structures

Blocker plate for use in a substrate process chamber

Selective tungsten deposition at low temperatures

Method for forming a metal gapfill

Method of reducing effective oxide thickness in a semiconductor str...

Apparatus to improve substrate temperature uniformity

System for measuring level of a precursor in a container

Methods for depositing semiconductor films

Blocker plate for use in a substrate process chamber

Methods for forming low-resistance contacts through integrated proc...

Methods for forming metal organic tungsten for middle of the line (...

Tungsten growth modulation by controlling surface composition

PVD ALN film with oxygen doping for a low etch rate hardmask film

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR AR METROLOGY TOOL

Processing Chamber With Multiple Plasma Units

PROCESSING SYSTEM AND METHODS FOR FORMING VOID-FREE AND SEAM-FREE T...

ELECTROSTATIC CHUCK COVER PIECE TO ENABLE PROCESSING OF DIELECTRIC...

SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES

MULTIFUNCTIONAL PRINTHEAD SERVICE STATION WITH MULTI-AXIS MOTIONS

INKJET PLATFORM FOR FABRICATION OF OPTICAL FILMS AND STRUCTURES

FLUID MANAGEMENT SYSTEM FOR INKJET MACHINES

Processing Chamber With Multiple Plasma Units

DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL

METHOD OF MEASURING EFFICIENCY FOR OPTICAL DEVICES

SELECTIVE TUNGSTEN DEPOSITION WITHIN TRENCH STRUCTURES

OPTICAL DEVICE METROLOGY SYSTEMS AND RELATED METHODS

ILLUMINATION SYSTEM FOR AR METROLOGY TOOL

IN-LINE METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL DEVICES

SEE-THROUGH METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL D...

SEE-THROUGH METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL D...

IN-LINE METROLOGY SYSTEMS, APPARATUS, AND METHODS FOR OPTICAL DEVICES

MULTIPLE-CHANNEL SHOWERHEAD DESIGN AND METHODS IN MANUFACTURING

LOW-TEMPERATURE PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL

METHODS AND APPARATUS FOR CLEANING A SHOWERHEAD

DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL

Processing Chamber With Multiple Plasma Units

SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES

METHOD FOR FORMING A METAL GAPFILL

METHOD OF REDUCING EFFECTIVE OXIDE THICKNESS IN A SEMICONDUCTOR STR...

BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER

SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY

METHODS FOR DEPOSITING SEMICONDUCTOR FILMS

Precursor Level Sensor