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Kazuya Dobashi
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Hillsboro, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Substrate cleaning method, processing container cleaning method, an...
Patent number
11,865,590
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kyoko Ikeda
B08 - CLEANING
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Patent Grant
Substrate cleaning method, processing container cleaning method, an...
Patent number
11,504,751
Issue date
Nov 22, 2022
Tokyo Electron Limited
Kyoko Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
Publication number
20230063907
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Kyoko IKEDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
Publication number
20220001426
Publication date
Jan 6, 2022
TOKYO ELECTRON LIMITED
Kyoko IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern Enhancement Using a Gas Cluster Ion Beam
Publication number
20210335568
Publication date
Oct 28, 2021
TOKYO ELECTRON LIMITED
Kazuya Dobashi
H01 - BASIC ELECTRIC ELEMENTS