Kazuya Goda

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 10,046,372
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Kazuya Goda
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240021445
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS