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Kazuya Hirayama
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Kanagawa, JP
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last 30 patents
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Patent Grant
Method and apparatus for etching disk-like member
Patent number
7,494,597
Issue date
Feb 24, 2009
Sumco Techxiv Corporation
Tadamitsu Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and apparatus for etching disk-like member
Publication number
20070017901
Publication date
Jan 25, 2007
Komatsu Denshi Kinzoku Kabushiki Kaisha
Tadamitsu Miyazaki
H01 - BASIC ELECTRIC ELEMENTS