Kazuya HISANO

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,087,588
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Hirotoshi Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,823,922
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate defect inspection method, storage medium, and substrate d...
- Patent number 11,669,955
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Shin Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,609,502
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method, substrate inspection apparatus and rec...
- Patent number 11,378,388
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method and substrate inspection apparatus
- Patent number 11,268,912
- Issue date Mar 8, 2022
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Substrate inspection apparatus and method for operating the same
- Patent number 9,025,852
- Issue date May 5, 2015
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Image creation method, substrate inspection method, non-transitory...
- Patent number 8,855,402
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Hiroshi Tomita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method, substrate inspection system and storag...
- Patent number 8,212,869
- Issue date Jul 3, 2012
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and computer-readable storage medium
- Patent number 8,040,500
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20240416450
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Kazuya HISANO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20230197480
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220359212
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Hirotoshi MORI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210242084
- Publication date Aug 5, 2021
- TOKYO ELECTRON LIMITED
- Yoshihiro KAWAGUCHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE DEFECT INSPECTION METHOD, STORAGE MEDIUM, AND SUBSTRATE D...
- Publication number 20210166365
- Publication date Jun 3, 2021
- Tokyo Electron Limited
- Shin INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
- Publication number 20210053150
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Hirotoshi MORI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER PROCESSING DEVICE, LASER PROCESSING SYSTEM AND LASER PROCESSI...
- Publication number 20200411338
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Hirotoshi MORI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20200285156
- Publication date Sep 10, 2020
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...
- Publication number 20200096321
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION METHOD AND SUBSTRATE INSPECTION APPARATUS
- Publication number 20200025692
- Publication date Jan 23, 2020
- TOKYO ELECTRON LIMITED
- Kazuya HISANO
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF REMOVING COATING FILM OF SUBSTRATE PERIPHERAL PORTION, SU...
- Publication number 20140124479
- Publication date May 8, 2014
- TOKYO ELECTRON LIMITED
- Hiroshi TOMITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME
- Publication number 20120307045
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Application
IMAGE CREATION METHOD, SUBSTRATE INSPECTION METHOD, NON-TRANSITORY...
- Publication number 20120237110
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi Tomita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAG...
- Publication number 20100141755
- Publication date Jun 10, 2010
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION METHOD AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20090226077
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Kazuya HISANO
- G06 - COMPUTING CALCULATING COUNTING

Kazuya HISANO

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate inspection apparatus, substrate processing apparatus, sub...

Substrate defect inspection method, storage medium, and substrate d...

Substrate inspection apparatus, substrate processing apparatus, sub...

Substrate inspection method, substrate inspection apparatus and rec...

Substrate inspection method and substrate inspection apparatus

Substrate inspection apparatus and method for operating the same

Image creation method, substrate inspection method, non-transitory...

Substrate inspection method, substrate inspection system and storag...

Defect inspection method and computer-readable storage medium

Patents Applicationslast 30 patents

PROCESSING METHOD AND PROCESSING SYSTEM

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE DEFECT INSPECTION METHOD, STORAGE MEDIUM, AND SUBSTRATE D...

LASER PROCESSING DEVICE AND LASER PROCESSING METHOD

LASER PROCESSING DEVICE, LASER PROCESSING SYSTEM AND LASER PROCESSI...

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...

SUBSTRATE INSPECTION METHOD AND SUBSTRATE INSPECTION APPARATUS

METHOD OF REMOVING COATING FILM OF SUBSTRATE PERIPHERAL PORTION, SU...

SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME

IMAGE CREATION METHOD, SUBSTRATE INSPECTION METHOD, NON-TRANSITORY...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAG...

DEFECT INSPECTION METHOD AND COMPUTER-READABLE STORAGE MEDIUM