Kazuya ICHIKI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,051,571
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Kazuya Ichiki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220139682
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Kazuya ICHIKI
- H01 - BASIC ELECTRIC ELEMENTS