Kazuya Kato

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of processing target object
- Patent number 9,780,037
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Kazuya Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 7,300,881
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- Kazuya Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and evacuation ring
- Patent number 7,255,773
- Issue date Aug 14, 2007
- Tokyo Electron Limited
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device and exhaust ring
- Patent number 6,878,234
- Issue date Apr 12, 2005
- Tokyo Electron Limited
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20220384183
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Wakako ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING TARGET OBJECT
- Publication number 20170084542
- Publication date Mar 23, 2017
- TOKYO ELECTRON LIMITED
- Kazuya Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND ELECTRODE PLATE, ELECTRODE SUPPORTI...
- Publication number 20080156441
- Publication date Jul 3, 2008
- TOKYO ELECTRON LIMITED
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and evacuation ring
- Publication number 20050126488
- Publication date Jun 16, 2005
- TOKYO ELECTRON LIMITED
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method
- Publication number 20050101137
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Kazuya Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing device and exhaust ring
- Publication number 20040025788
- Publication date Feb 12, 2004
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus, and electrode plate, electrode support...
- Publication number 20030155078
- Publication date Aug 21, 2003
- TOKYO ELECTRON LIMITED
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS

Kazuya Kato

Person

Patents Grantslast 30 patents

Method of processing target object

Plasma etching method

Plasma processing apparatus and evacuation ring

Plasma processing device and exhaust ring

Patents Applicationslast 30 patents

CLEANING METHOD AND PLASMA PROCESSING APPARATUS

METHOD OF PROCESSING TARGET OBJECT

PLASMA PROCESSING APPARATUS AND ELECTRODE PLATE, ELECTRODE SUPPORTI...

Plasma processing apparatus and evacuation ring

Plasma etching method

Plasma processing device and exhaust ring

Plasma processing apparatus, and electrode plate, electrode support...