Kazuya KIJIMA

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Detection apparatus, detection method, exposure apparatus, exposure...
- Patent number 11,835,470
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Kazuya Kijima
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...
- Publication number 20240393702
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- RYOTA MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION APPARATUS, DETECTION METHOD, EXPOSURE APPARATUS, EXPOSURE...
- Publication number 20240027365
- Publication date Jan 25, 2024
- Canon Kabushiki Kaisha
- Kazuya KIJIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTION APPARATUS, DETECTION METHOD, EXPOSURE APPARATUS, EXPOSURE...
- Publication number 20220178843
- Publication date Jun 9, 2022
- Canon Kabushiki Kaisha
- Kazuya KIJIMA
- G06 - COMPUTING CALCULATING COUNTING