Kazuya Konaga

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus and substrate processing apparatus
- Patent number 10,062,551
- Issue date Aug 28, 2018
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 9,322,094
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 9,322,095
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 9,109,285
- Issue date Aug 18, 2015
- Canon Anelva Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and electronic device manufacturing method
- Patent number 8,303,785
- Issue date Nov 6, 2012
- Canon Anelva Corporation
- Yoh Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150262796
- Publication date Sep 17, 2015
- Canon ANELVA Corporation
- Shigenori ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140102889
- Publication date Apr 17, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140054167
- Publication date Feb 27, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140034489
- Publication date Feb 6, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20110089023
- Publication date Apr 21, 2011
- Canon ANELVA Corporation
- YOH TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...