-
-
-
-
-
-
Chemical vapor deposition apparatus
-
Patent number 5,803,974
-
Issue date Sep 8, 1998
-
Canon Kabushiki Kaisha
-
Nobuo Mikoshiba
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
-
Process for forming deposited film
-
Patent number 5,753,320
-
Issue date May 19, 1998
-
Canon Kabushiki Kaisha
-
Nobuo Mikoshiba
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Process for thin film formation
-
Patent number 5,604,153
-
Issue date Feb 18, 1997
-
Kazuo Tsubouchi
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
-
-
-
-
-
Integrated circuit
-
Patent number 5,245,207
-
Issue date Sep 14, 1993
-
Nobuo Mikoshiba
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
-
-
-
Plasma CVD of aluminum films
-
Patent number 5,091,210
-
Issue date Feb 25, 1992
-
Canon Kabushiki Kaisha
-
Nobuo Mikoshiba
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...