Kazuya MATSUMOTO

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of etching object to be processed
- Patent number 10,685,816
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Yoshihiro Umezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slip ring, support mechanism, and plasma processing apparatus
- Patent number 10,665,434
- Issue date May 26, 2020
- Tokyo Electron Limited
- Kazuya Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maintenance method of plasma processing apparatus
- Patent number 10,541,142
- Issue date Jan 21, 2020
- Tokyo Electron Limited
- Kazuya Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and shutter member
- Patent number 10,529,599
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Toshinori Kitabata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Heat transfer sheet adhering apparatus and method
- Patent number 9,427,913
- Issue date Aug 30, 2016
- Tokyo Electron Limited
- Toshinori Kitabata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220384154
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Yusuke HAYASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190131158
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kazuya MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAINTENANCE METHOD OF PLASMA PROCESSING APPARATUS
- Publication number 20190131137
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kazuya MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING OBJECT TO BE PROCESSED
- Publication number 20180337025
- Publication date Nov 22, 2018
- TOKYO ELECTRON LIMITED
- Yoshihiro UMEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLIP RING, SUPPORT MECHANISM, AND PLASMA PROCESSING APPARATUS
- Publication number 20180047547
- Publication date Feb 15, 2018
- TOKYO ELECTRON LIMITED
- Kazuya MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SHUTTER MEMBER
- Publication number 20150114564
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Toshinori KITABATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TRANSFER SHEET ADHERING APPARATUS AND METHOD
- Publication number 20140008010
- Publication date Jan 9, 2014
- Toshinori KITABATA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Kazuya MATSUMOTO

Person

Patents Grantslast 30 patents

Method of etching object to be processed

Slip ring, support mechanism, and plasma processing apparatus

Maintenance method of plasma processing apparatus

Substrate processing apparatus and shutter member

Heat transfer sheet adhering apparatus and method

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

MAINTENANCE METHOD OF PLASMA PROCESSING APPARATUS

METHOD OF ETCHING OBJECT TO BE PROCESSED

SLIP RING, SUPPORT MECHANISM, AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SHUTTER MEMBER

HEAT TRANSFER SHEET ADHERING APPARATUS AND METHOD